Hoge laterale- en diepte-resolutie ionenstraalanalyse van lateraal begrensde nanostructuren KU Leuven
Quantitative analysis of thin films and nanostructures is a cornerstone in the development of future nanoelectronic devices. Within standard Ion Beam Analysis, a high energy ion beam impinges on the sample whereby the intensity of the scattered particles and their energy contains information about the elements, their concentration and their depth distribution. The evolution on novel detector systems (multidetectors , magnetic sector with ...