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Onderzoeker
Ziad El Otell
- Disciplines:Fysica van gecondenseerde materie en nanofysica, Analytische chemie, Farmaceutische analyse en kwaliteitszorg, Anorganische chemie, Organische chemie, Fysische chemie
Affiliaties
- Duurzame Chemie voor Metalen en Moleculen (Afdeling)
Lid
Vanaf10 jan 2014 → 9 jan 2016
Publicaties
1 - 9 van 9
- Comparison of vacuum ultra-violet emission of Ar/CF4 and Ar/CF3I capacitively coupled plasmas(2016)
Auteurs: Ziad El Otell
- Molecular glass resist performance for nano-pattern transfer(2015)
Auteurs: Ziad El Otell
Pagina's: 94280 - Tailored molecular glass resists for Scanning Probe Lithography(2015)
Auteurs: Ziad El Otell
Pagina's: 94250 - Method for in-situ etch uniformity monitoring using plasma emission interferometry(2015)
Auteurs: Vladimir Samara, Ziad El Otell
- Impact of sequential infiltration synthesis on pattern fidelity of DSA lines(2015)
Auteurs: Arjun Singh, Ziad El Otell
Pagina's: 94250 - Vacuum ultra-violet emission of CF4 & CF3I containing plasmas and their effect on low-k materials(2015)
Auteurs: Ziad El Otell, Vladimir Samara
Pagina's: 395202 - Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma(2015)
Auteurs: Ziad El Otell
Pagina's: 065008 - Hydrogen plasma treatment: The evolution of roughness in frequency domain(2014)
Auteurs: Peter De Schepper, Cultureman Vaglio Pret, Ziad El Otell, Stefan De Gendt
Pagina's: 1 - 1 - Line edge and width roughness smoothing by plasma treatment(2014)
Auteurs: Peter De Schepper, Cultureman Vaglio Pret, Ziad El Otell, Stefan De Gendt