Diamond tips for automated electrical probing inside a scanning electron microscopy system KU Leuven
Pyramidal tips made from boron doped diamond have become the ultimate choice for electrically measuring semiconductor device structures in electrical atomic force microscopy (AFM). An advanced measurement setup with diamond probing units directly integrated inside a scanning electron microscopy (SEM) system is highly wanted as this allows for accurate tip positioning compared to the optical microscope of a standard AFM and enables also multiple ...