Self-oscillating Thermal-piezoresistive Coupled Resonators for Stable Mass and Stiffness Measurement in Air KU Leuven
Micro-ElectroMechanical Structure (MEMS) based resonators have been at the forefront of scientific advancements for several decades, widely recognized for their compact size, high precision, extensive dynamic range, energy efficiency, and cost-effective production. These attributes have led to their successful implementation in industries, especially in the development of timing oscillators and pressure sensors. However, despite their ...