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Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process

Tijdschriftbijdrage - Tijdschriftartikel

A compressible multifunctional interconnect for out-of-plane MEMS structures has been fabricated using a thin film transfer bonding technique and bio-tolerable materials. The bulk material of the stretchable film consists of photo-patternable poly-dimethylsiloxane and is fabricated on a carrier substrate. The film is bonded to a slim-base platform. The carrier substrate of the thin film is released using an aluminum anodic dissolution technique. Probe arrays can be assembled perpendicularly into a slim-base platform. Once the probes are assembled a non-separable electrical connection is established. © 2011 IOP Publishing Ltd.
Tijdschrift: Journal of Micromechanics & Microengineering
ISSN: 0960-1317
Issue: 7
Volume: 21
Aantal pagina's: 10
Jaar van publicatie:2011