Miniature absolute optical pressure sensor at a fiber tip for high temperature applications

Fiber optic pressure sensors have attracted considerable attention because of their small size, high sensitivity and immunity to electromagnetic interference. Here, a miniature absolute pressure sensor at the edge of a fiber is presented. Contradictory to earlier pressure sensors with membranes at the fiber tip (in a co-axial configuration), we present a sensor in a cross-axial configuration. It is optimized for aerodynamic pressure measurements in turbomachinery. The sensor is fabricated by thin film deposition techniques and focused ion beam (FIB) microfabrication and uses multilayer Fabry-Perot (FP) interferometry as sensing principle. The reflected power intensity of the prototype is experimentally verified to be 0.77%/bar.

Jaar van publicatie:2012

BOF-keylabel:ja

IOF-keylabel:ja

Authors from:Higher Education

Toegankelijkheid:Open