Integrated Sensors and Actuators: Their Nano-Enabled Evolution into the Twenty-First Century

© 2017 Wiley-VCH Verlag GmbH & Co.KGaA. All rights reserved. This chapter presents how micro- and nanoelectronic fabrication technology influenced the world of transducers. Membrane-based pressure sensors were the ffirst sensors to be miniaturized in silicon. Gas sensors are applied in industrial safety devices, but are reaching the home in applications such as CO detection. All current commercial pressure sensors are still of the membrane type, and also the related microelectromechanical systems (MEMS) microphones are membrane based. A microelectromechanical resonator is an actuated structure that is tuned to vibrate at a certain frequency. There is a great potential for millimeter wave or terahertz imaging to replace or complement a series of nuclear technology-based measuring techniques, such as film thickness monitoring in industry, X-ray scanning, and so on. The increasing performance of nanoelectronics also has its consequences for existing radar and lidar applications. Electrostatic actuation is widely used in microdevices. Piezoelectric actuation is another workhorse at the micro- and nanometer scale.

ISBN:978-3-527-34053-8

Jaar van publicatie:2017