Achieving high-resolution, quantitative tomography of 3-dimensional nano-scale devices KU Leuven
Advanced semiconductor technology heavily relies on 3D concepts such as nanosheets with critical dimensions below 7 nm. The functionality and performance of these devices is a tight interplay between the structure and chemical composition at the atomic level. Clearly, device fabrication and characterization, two processes that must go hand-in-hand, become increasingly complex and call for clever fabrication and 3D metrology solutions with ...