Light interactions with periodic nanoline arrays for nanoelectronic applications KU Leuven
Periodic nanolines arrays are ubiquitous in modern nanoelectronics, covering both the front- and back-end-of-line in the form of, respectively, semiconductor-based fin field-effect transistors (FinFETs) and metallization made of copper, tungsten, or, in the future, the platinum-group metals. Due to their non-contact nature, optical techniques are a promising candidate for the metrology and manufacturing of such devices. However, the introduction ...