Thermodynamic modeling of chemical reactions in material growth and etching KU Leuven
Across the evolution of different technology nodes, the continuous reduction of the dimensions of the building blocks of CMOS has been pushing the physical limits of the active components in transistor and memory devices into numerous ends. Consequently, a straightforward linear scaling of the dimensions does not apply anymore to all the aspects of the active components. An educated selection of new materials with improved performances and ...