A FORCE SENSING DEVICE AND A FORCE SENSING SYSTEM Interuniversity Microelectronics Centre
For a MOMPS (Micro-Opto-Mechanical Pressure Sensor/System) , we propose to integrated two (or more) MZI devices using a single membrane. The one would have a small range with high sensitivity. The other would have a big range and low sensitivity. By using more than one output we can obtain a system with both a large range and a high sensitivity.