Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP KU Leuven
We use oxide chemical mechanical planarization (CMP) as a convenient test vehicle for comparing the material removal rate and defectivity induced by different silica abrasives. The effect of particle shape is investigated by comparing fumed and colloidal silica. In particular, the effect of a polymer core on the behavior of a composite abrasive is explored. Overall, fewer and shallower scratches are detected for the composites with a colloidal ...