Design and manufacturing of aspherical GaAs-SILs for a versatile optical semiconductor failure analysis system Vrije Universiteit Brussel
In this study, we have developed an aspherical solid immersion lens (SIL) made of gallium arsenide (GaAs) for semiconductor failure analysis. A SIL is an optical component to dramatically increase the numerical aperture and the spatial resolution of a microscopy system by attaching it to the backside of the device-under-test. To further enhance the spatial resolution of the optical microscopy system, a shorter wavelength light source has also ...