A METHOD AND APPARATUS FOR ATOMIC PROBE TOMOGRAPHY Interuniversity Microelectronics Centre
The invention described herein provides a means to image the Atom Probe Tomography (APT) sample (APT tip) during the course of analysis (in-situ and in real time). This is carried out by irradiating the sample (APT tip) with soft x-rays (600 eV) and collecting the resultant coherent pattern. The images are then extracted using ptychography. These images will be fed into the APT 3D volume reconstruction algorithm to allow for distortion free APT imaging of any solid sample.