A study of the relation between water based precursor chemistry, morphology and transport properties of electroceramic metal oxide films. (R-1316)

The objective of this project, which also provides the scheduling, contains the development of a water-based synthesis method for the deposition of Ru-based oxide electrode materials and a study of the relationship between the morphological characteristics and electrical transport properties of these materials. This study should allow to optimize the synthesis and process conditions so that in addition to new fundamental insights, electrode materials with suitable properties for applications may result.Thus optimized electrode materials will also be implemented in electronic systems: - as an alternative electrode in a ferro-electric capacitor which can impose an increased number ompolingscycli, which benefits to the life expectancy - as top-electrode in new 'gate stacks' with alternative ultra-thin high-K gate-dielectrica This NI is innovative in the following aspects: - a new water-based deposition method for Ru-oxide thin films will be developed - the study of transport properties in relation to morphology and the synthesis of metaloxides is a new research topic within the IMO - the new cooperation between the involved groups are planned, which combines their main expertise (Water-based synthesis / MK Van Bael,magnetic and electrical transport properties / P. Wagner, morphological characterization / J. D'Haen) - the studied oxides are candidates who can meet the demand for new electrode materials in future more performant and nano-dimensional electronic systems.

Keywords:CHEMISTRY, MORPHOLOGY, PRECURSOR

Disciplines:Chemical sciences