Field emission gun electron microprobe for quantitative submicron chemical and phase analysis of multicomponent materials.

In an electron microprobe analysis (EPMA) system a finely focusable electron beam irradiates the sample and from the interaction volume characteristic X-rays are emitted that are detected by energy and wevelength dispersive spectrometers. With the system the concentration of elements from B to U can be accurately measured to low (ppm) levels in complex multicomponent materials. EPMA is therefore one of the essential micro-analysis techniques with a wide range of applications in the fields of materials science, geology, metallurgy and environmental science. The aim of this project is to make this advanced facility also available to external academic and industrial users in the wider Benelux region.

Keywords:Field emission gun electron microprobe, Multicomponent materials

Disciplines:Ceramic and glass materials, Materials science and engineering, Semiconductor materials, Other materials engineering