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Publication

JMEMS Letters On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors

Journal Contribution - Journal Article

Journal: Journal of Microelectromechanical Systems

ISSN: 1057-7157

Issue: 2

Volume: 31

Pages: 180 - 182

Publication year:2022

WoS Id: 000748527700001
DOI: https://doi.org/10.1109/jmems.2022.3141830
Institutional Repository URL: https://lirias.kuleuven.be/3684525

Accessibility:Open