The influence of the Angle of Incidence in Megasonic Cleaning

The megasonic cleaning efficiency is evaluated as a function of the angle of incidence of acoustic waves on a Si wafer. Acoustic Schlichting streaming alone is not able to remove nanoparticles smaller than 400 nm. It is shown that oscillating or collapsing behavior of bubbles are responsible for removing nanoparticles smaller than 400 nm during a cleaning process with ultrasound. Optimal particle removal efficiency is obtained around the angle of acoustic transmission of the silicon wafer. © (2012) Trans Tech Publications.

ISBN:9783037853887

Publication year:2012

BOF-keylabel:yes

IOF-keylabel:yes

Authors from:Government, Higher Education