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Publication

Surface analysis in the semiconductor industry: Present use and future possibilities

Journal Contribution - Journal Article

Journal: Surface and Interface Analysis
ISSN: 0142-2421
Issue: 12
Volume: 52
Pages: 786 - 791
Publication year:2020
BOF-keylabel:yes
IOF-keylabel:yes
BOF-publication weight:0.5
CSS-citation score:1
Authors:International
Authors from:Government, Higher Education

Authors/publisher

  • Paul AW van der Heide (First author)
  • Valentina Spampinato (Author)
  • Alexis Franquet (Author)
  • Charlotte Zborowski (Author)
  • Thierry Conard (Author)
  • Jonathan Ludwig (Author)
  • Kristof Paredis (Author)
  • Wilfried Vandervorst (Author)
  • Alexander Pirkl (Author)
  • Ewald Niehuis (Last author)

Research units