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Publication
Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
Journal Contribution - Journal Article
Journal: PHYSICAL CHEMISTRY CHEMICAL PHYSICS
ISSN: 1463-9084
Issue: 17
Volume: 22
Pages: 9262 - 9271
Publication year:2020
Accessibility:Closed