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Publication
Oxygen Gettering Cap to Scavenge Parasitic Oxide Interlayer in TiSi Contacts
Journal Contribution - Journal Article
Journal: IEEE Electron Device Letters
ISSN: 0741-3106
Issue: 11
Volume: 40
Pages: 1712 - 1715
Publication year:2019
BOF-keylabel:yes
IOF-keylabel:yes
BOF-publication weight:1
CSS-citation score:1
Authors:International
Authors from:Government, Higher Education