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Publication

Influence of Composition of SiCN as Interfacial Layer on Plasma Activated Direct Bonding

Journal Contribution - Journal Article

Journal: Ecs Journal Of Solid State Science And Technology

ISSN: 2162-8769

Issue: 6

Volume: 8

Pages: P346 - P350

Institutional Repository URL: https://lirias.kuleuven.be/2820438
DOI: https://doi.org/10.1149/2.0241906jss
WoS Id: 000472141700001