Characterization of regions with different crystallinity in materials KU Leuven
A method (200) for characterizing a region in a sample under study is described. The sample under study comprising a first region having first crystalline properties and a second region having second crystalline properties. The method (200) comprises irradiating (210) the sample under study with an electron beam, the average relative angle between the electron beam and the sample under study being selected so that a contribution in the backscattered or forward scattered signal of the first region is distinguishable from that of the second region, detecting (220) the backscattered or forward ...