In-situ growth of platinum with hierarchical porosity for low impedance biomedical microelectrode fabrication KU Leuven
We report a novel process that allows depositing hierarchically porous platinum, i.e. platinum with structured pores from about 1 micron down to 3 nm in porosity, in situ on flexible microelectrodes. The process is based on molecular self-assembly of a porous silica zeotile, which is then deposited on the electrode contacts of flexible platinum electrode arrays fabricated with classic lithographic techniques. The pores are then Pt filled using ...