Publicaties

The influence of the deposition rate on the formation of growth twins in nanocrystalline Pd films deposited by electron beam evaporation is investigated using transmission electron microscopy. Statistical measurements prove that twin boundary (TB) density and volume fraction of grains containing twins increase with increasing deposition rate. A clear increase of the dislocation density was observed for the highest deposition rate of 5 Å/s, ...

Along with the introduction of the 32 nm technology node in the next years, the methods for correcting the proximity effect face certain limitations of measurement performance and the underlying point spread function based models themselves. To extend these methods to future technology nodes, they have to rely on more generalized coherences between nominal and measured feature sizes than just the absolute measurement values. In this work, a ...

High-resolution transmission electron microscopy (TEM) of organic crystals, such as Lead Phthalocyanine (PbPc), is very challenging since these materials are prone to electron beam damage leading to the breakdown of the crystal structure during investigation. Quantification of the damage is imperative to enable high-resolution imaging of PbPc crystals with minimum structural changes. In this work, we performed a detailed electron diffraction ...

Electron beam induced etching (EBIE) with SF6 precursor molecules has been demonstrated as an approach to induce localized etching of Si with an etch yield of approximately 0.003 atoms/incoming electron. Further understanding of the EBIE mechanisms is presented through an analysis of the influence of the different electron beam parameters (beam energy and electron flux) and the effect of the sample bias on the EBIE rate. It is demonstrated that ...

Organometal halide perovskites show promising features for cost-effective application in photovoltaics. The material instability remains a major obstacle to broad application because of the poorly understood degradation pathways. Here, we apply simultaneous luminescence and electron microscopy on perovskites for the first time, allowing us to monitor in situ morphology evolution and optical properties upon perovskite degradation. Interestingly, ...

© 2017 Acta Materialia Inc. A non weldable nickel-based superalloy was fabricated by powder bed-based selective electron beam melting (S-EBM). The as-built samples exhibit a heterogeneous microstructure along the build direction. A gradient of columnar grain size as well as a significant gradient in the γ′ precipitate size were found along the build direction. Microstructural defects such as gas porosity inherited from the powders, shrinkage ...

We study the effect of electron beam irradiation on the bending modulus of multiwall carbon nanotubes grown by chemical vapor deposition. Atomic force microscopy observations of the nanotube deflection in the suspended-beam geometry suggest an internal, reversible stick-slip motion prior to irradiation, indicating presence of extended defects. Upon electron beam irradiation, nanotubes with an initial bending modulus exceeding 10 GPa initially ...