Trench capacitor device for a superconducting electronic circuit, superconducting qubit device and method for forming a trench capacitor device for a qubit device. Interuniversitair Micro-Electronica Centrum vzw
The disclosure relates to a trench capacitor device (100) for a superconducting electronic circuit, comprising: a substrate (102); and a first capacitor electrode (104) and a second capacitor electrode (108), each of a superconductor and extending into the substrate, the first electrode being circumferentially enclosed by the second electrode such that an inwardly facing surface (108a) of the second electrode faces an outwardly facing surface (104a) of the first electrode.