Novel high frequency pulsed MW-linear antenna plasma-chemistry: Routes towards large area, low pressure nanodiamond growth Universiteit Hasselt
Current experimental microwave plasma enhanced chemical vapour deposition (MW PECVD) concepts for diamond thin films do not allow scaling up towards large areas, which is essential for microelectronic industries. Also, current growth temperatures are rather high and not compatible with processing technologies. In the current work we demonstrate a breakthrough concept using a high frequency (HF) pulsed MW-linear antenna plasma configuration, ...