FEM simulation and measurement validation of a cMUT cell KU Leuven
This paper presents Finite Element Modeling (FEM) simulation and experimental results of the acoustic and mechanical behavior of an isolated cMUT cell. cMUT cells fabricated in the SiGeMEMS technology of imec are used as test vehicles. Dynamic characteristics of a cMUT cell actuated by a pulse superimposed on a DC bias, such as resonance frequency, Q-factor and transient displacement, are studied using ANSYS FEM and Polytec vibrometer ...