A phase difference detector, a chip comprising the same, a phase difference detection system and a method for detecting a phase difference Universiteit Gent
A phase difference detector (10) for a single target location (24) comprising: a planar waveguide (12) for guiding a laser beam, the planar waveguide having a normal direction (N); a grating coupler (14) to split the laser beam into a reference beam (18) and a measurement beam (16), wherein the measurement beam is directed towards the target location and the reference beam is directed away from the target location, the reference beam and the measurement beam each being inclined with respect to said normal direction; a planar imager array (36) configured to detect a fringe pattern generated by ...