Publicaties
Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array KU Leuven
This paper presents a fully addressable 8 × 8 two-dimensional (2D) rigid piezoelectric micromachined ultrasonic transducer (PMUT) array. The PMUTs were fabricated on a standard silicon wafer, resulting in a low-cost solution for ultrasound imaging. A polyimide layer is used as the passive layer in the PMUT membranes on top of the active piezoelectric layer. The PMUT membranes are realized by backside deep reactive ion etching (DRIE) with an ...
Novel phased array piezoelectric micromachined ultrasound transducers (PMUTs) for medical imaging KU Leuven
Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm KU Leuven
This paper describes a novel electrostatically actuated microgripper with freeform geometries designed by a genetic algorithm. This new semiautomated design methodology is capable of designing near-optimal MEMS devices that are robust to fabrication tolerances. The use of freeform geometries designed by a genetic algorithm significantly improves the performance of the microgripper. An experiment shows that the designed microgripper has a large ...
Monitoring Lower Back Activity in Daily Life Using Small Unintrusive Sensors and Wearable Electronics in the Context of Rheumatic and Musculoskeletal Diseases KU Leuven
Due to a sedentary lifestyle, the amount of people suffering from musculoskeletal back diseases has increased over the last few decades. To monitor and cure these disabilities, sensors able to monitor the patient for long-term measurement during daily life and able to provide real-time feedback are required. There are only a few wearable systems that are capable to acquire muscle activity (sEMG) and posture at the same time. Moreover, previously ...
Fast Tunable Biological Fluorescence Detection Device with Integrable Liquid Crystal Filter KU Leuven
Piezoelectric Micromachined Ultrasound Transducer (pMUT) Array for Underwater Communication KU Leuven
This project is about designing a low power and small (um range) ultrasound piezoelectric transducer for mid-range (>1meter) underwater communication. The aforesaid device has many applications, such as the exploration of inaccessible environments, bio-sensing, surface mapping, etc. The scientific approach of the project can be divided into three parts; piezoelectric material growing, fabrication of a communication module and electronics. ...
Micromachined Accelerometers with Sub-μg/√Hz Noise Floor: A Review KU Leuven
This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/√Hz are discussed. Such sensors can mainly be categorized into: (i) ...