Method for activating a porous layer surface

A method for activating an exposed surface (1) of a porous dielectric layer (2), the method comprising the steps of: I. Filling with a first liquid (5) at least the pores (4) present in a part (10) of the porous dielectric layer (2), said part (10) comprising the exposed surface (1), II. Removing the first liquid (5) selectively from the surface (1), III. Activating the exposed surface (1), and IV. Removing the first liquid (5) from the bulk part (3) of the porous dielectric layer (2).

Octrooi-publicatienummer: EP2884523

Jaar aanvraag: 2020

Jaar toekenning: 2020

Jaar van publicatie: 2020

Status: Toegewezen

Technologiedomeinen: Semiconductoren

Gevalideerd voor IOF-sleutel: Ja

Toegewezen aan: Associatie KULeuven