Optical tactile sensors

A sensor for sensing pressure is described. Such a sensor may be a pressure sensor for sensing pressure, or a tactile sensor for sensing tactile events through pressure measurement. The sensor comprises at least one pressure sensor comprising at least one VCSEL (11) on a substrate (10). It furthermore comprises a compressible sensor layer (14) covering a top surface of the at least one VCSEL (11) and a reflecting element (15) covering a top surface of the sensor layer. The invention furthermore relates to a method of manufacturing such a sensor.

Octrooi-publicatienummer: EP2446238B

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