Novel nano-electromechanical relay design procedure for logic and memory applications

This paper presents a rigorous design approach for (NanoElectroMechanical Structures/Systems) NEMS relays taking generalized nano-forces, e.g., Casimir, van der Waals, into account for their static and dynamic modelling. Key in our approach is the proper definition of the critical pull-in and pull-out conditions as well as the derived non-latching and non-self-actuation conditions, thus improving on previous works that used simplified models and approximated designs.We extend the consistent description of the quasi-static actuation of NEMS devices in presence of nano-forces and present adimensional formulas describing their dynamic actuation in presence of multi-electrode. In particular, we demonstrate the use of these developments to dimension an inverter and a NAND gate in a configuration dominated by the Van der Walls interaction.

ISBN:978-1-4665-6275-2

Jaar van publicatie:2012

BOF-keylabel:ja

IOF-keylabel:ja

Authors from:Government, Higher Education