A General “Line-Line” Method for Dielectric Material Characterization Using Conductors with the Same Cross-Sectional Geometry

© 2018 IEEE. This letter presents a general 'line-line' (LL) method for measuring dielectric material's permittivity using transmission lines. Like the previous LL methods, the proposed method needs a fully characterized transmission line as a reference. Different from previous methods, the reference line can be loaded with an arbitrary material and can be of an arbitrary length. The proposed method is validated with on-wafer dielectric fluid measurement up to 50 GHz, and measurement results of pure water agree well with literature values.

Jaar van publicatie:2018

BOF-keylabel:ja

IOF-keylabel:ja

BOF-publication weight:1

CSS-citation score:1

Auteurs:International

Authors from:Government, Higher Education