< Terug naar vorige pagina
Onderzoeker
Arantxa Maestre Caro
- Disciplines:Biochemie en metabolisme, Medische biochemie en metabolisme, Fysische chemie, Theoretische en computationele chemie, Andere chemie, Atmosferische wetenschappen
Affiliaties
- Kwantumchemie en Fysicochemie (Afdeling)
Lid
Vanaf17 sep 2007 → 16 sep 2011
Publicaties
1 - 8 van 8
- Selective self-assembled monolayer coating to enable Cu-to-Cu connectionin dual damascene vias(2013)
Auteurs: Arantxa Maestre Caro, Guido Maes, Gustaaf Borghs
Pagina's: 76 - 80 - Electrical properties of amino SAM layers studied with conductive AFM(2013)
Auteurs: Ravi Chandra Chintala, Arantxa Maestre Caro, Yiting Sun, Wilfried Vandervorst
Pagina's: 1952 - 1956 - Enabling Cu-Cu connection in (dual) damascene interconnects by selective deposition of two different SAM molecules(2011)
Auteurs: Arantxa Maestre Caro, Guido Maes, Gustaaf Borghs
Aantal pagina's: 3 - Stiction-free poly-SiGe resonant biosensors for monolithic integration with CMOS(2011)
Auteurs: Silvia Lenci, Francesco Pieri, Luc Haspeslagh, Jeroen De Coster, Stefaan Decoutere, Arantxa Maestre Caro, Silvia Armini, Ann Witvrouw
Pagina's: 2136 - 2139 - Materials engineering for future interconnects: catalyst-free electroless Cu deposition on self-assembled monolayer alternative barriers(2010)
Auteurs: Arantxa Maestre Caro
Pagina's: D74 - D80 - Electroless Cu deposition on self-assembled monolayer alternative barriers(2009)
Auteurs: Arantxa Maestre Caro
Pagina's: 1156 - Screening self-assembled monolayers as Cu diffusion barriers(2008)
Auteurs: Arantxa Maestre Caro, Guido Maes, Gustaaf Borghs
Pagina's: 2047 - 2050 - High quality NH2SAM (Self Assembled Monolayer) diffusion barrier for advanced copper interconnects
Auteurs: Arantxa Maestre Caro, Larry Zhao, Guido Maes, Gustaaf Borghs, Gerald Beyer, Zsolt Tokei, Silvia Armini, Youssef Travaly
Pagina's: 183 - 188