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A dual-mass capacitive-readout accelerometer operated near pull-in
Boekbijdrage - Boekhoofdstuk Conferentiebijdrage
A mechanical two-mass configuration and a readout circuit for a single-axis capacitive-readout accelerometer with ΣΔ force-feedback is presented. The system reduces electrical and quantisation input-referred noise through the use of negative springs, reduced gaps in the readout capacitors and maximised readout voltage. A theoretical analysis and simulation results are discussed.
Boek: Midwest Symposium on Circuits and Systems Conference Proceedings
Pagina's: 1185 - 1188
ISBN:9781424477739
Jaar van publicatie:2010
BOF-keylabel:ja
IOF-keylabel:ja
Toegankelijkheid:Open