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Octrooi
SEALED POROUS MATERIALS, METHODS FOR MAKING THEM, AND
The invention relates to a method for at least partially sealing a porous material comprising forming a sealing layer onto the porous material by applying a sealing compound comprising oligomers wherein the oligomers are formed by ageing a precursor solution comprising cyclic carbon bridged organosilica and/or bridged organosilanes. The invention is especially designed for low k dielectric porous materials to be incorporated into semiconductor devices.
Octrooi-publicatienummer: EP2573802
Jaar aanvraag: 2019
Jaar toekenning: 2019
Jaar van publicatie: 2019
Status: Toegewezen
URI: link to Espacenet
Technologiedomeinen: Semiconductoren
Gevalideerd voor IOF-sleutel: Ja
Toegewezen aan: Associatie Universiteit Gent