Atomic layer deposition of single and few layered transition metaldichalcogenides for future logic applications. KU Leuven
The group-VI transition metal dichalcogenides (MX2), such as tungsten disulfide (WS2), emerge as two-dimensional (2D) semiconductors that can complement the workhorse silicon as channel material in ultra-scaled nanoelectronic devices. Manufacturable approaches that develop highly crystalline MX2 layers, tailor the layer number down to the atomic level, and remain compatible with temperature sensitive structures, are ...