Towards improved atom probe tomography analysis of semiconductors : unraveling the dynamic evolution of the semiconductor emitter KU Leuven
To improve performance, the building blocks of electronics are continuously downsizing requiring control of their material properties and chemical composition at the nanoscale. This can be achieved using high resolution microscopes, such as the atom probe. Here, atoms are successively (ionized and) removed from the surface of the sample (shaped as a nanoscale needle) via a very high electric field and a laser pulse. Subsequently, the ionized ...