Ultraminiature high temperature and harsh environment pressure sensors for application inside fast response aerodynamic probes. KU Leuven
In this thesis, the design of micromachined pressure sensors for application in fast response aerodynamic probes in turbomachinery is investigated. The requirements for pressure sensing in avionics are stringent. Sensors should be able to operate at high temperatures (> 150 °C) and under high mechanical vibrations. The accurate probing of important gas flow parameters in turbines and compressors such as the dynamic and static pressure, the ...