Spray coating as an enabler for heterogeneous semiconductor systems-on-chip & bioelectronics Ghent University
The goal of this project is to develop the spray coating of photoresist, ultra-thin DVS-BCB adhesive bonding layers and other advanced polymers on 200 mm Si wafers or small samples comprising photonic or electronic integrated circuits (ICs), or MEMS. This will enable the realization of heterogeneous semiconductor systems-on-chip for application in optical transceivers, smart sensors and advanced electronic integrated circuits (analogue ...