Wafer scale non-destructive metrology on sub-wavelength diffraction gratings by means of Wood's anomaly Vrije Universiteit Brussel
Anomalistic behavior in diffraction responses of grating can be easily detected and can indirectly provide information about the grating parameters such as the grating period, height, duty-cycle and profile. More precisely, the absorption resonance (Wood's anomaly) which arises from the excitation of a surface plasmon polariton (SPP) in reflective sub-wavelength diffraction gratings are of interest as well as Rayleigh's anomaly which takes the ...