A flexible atomic layer depostition reactor for structural control over matter at the nanometer scale KU Leuven
Nanotechnology has become a cornerstone of materials science. Not only have existing materials been miniaturized (e.g. through nanoparticle synthesis), the unique properties of nanostructured materials open up opportunities to push the technological envelope in a wide range of applications. Atomic layer deposition (ALD) is one of very few tools able structure matter at the (sub-)nanometer scale, by the stepwise deposition of reactive ...