Joint focused ion beam (FIB) facility for nanofabrication and nanocharacterization KU Leuven
Manufacturing Processes and Systems (MaPS), Quantum Solid State Physics (QSP), Universiteit Hasselt
The dual beam FIB (focused ion beam) system allows the controlled restructuring, removal or deposition of material with a lateral resolution of just a few nanometer. By bombarding a sample with a low-energy, focused ion beam, one can create nanostructure with a specific size and shape, modify their structure, or electrically isolate them from their vicinity. Hence, the properties can be tuned at nanometer scale. Moreover, this process allows ...