Innovation in ion beam analysis for nanoelectronic materials KU Leuven
Nanoelectronics relies more and more on novel materials and architectures for technology advancements in terms of power, cost and area. The device functionalities depend on the composition and the amount of impurities of the device materials, whereby controlling the concentrations with high accuracy is essential to tailor the device performances. Besides, it is crucial to characterize devices with relevant dimensions and substrates as it is ...