Low Voltage Scanning Electron Microscope (LV-SEM) Ghent University
L-SCAN combines a low voltage SEM (LV-SEM) which allows for performant operation at acceleration voltages of a few kiloelectronvolts or less in combination with a state-of-the-art X-ray spectrometer
offering light element sensitivity down to the detection and mapping of Li K X-rays (ca. 55 eV). Top quality characterization of air-sensitive materials will be enabled by a specimen transfer vessel to bring samples from its control production environment under inert atmosphere to the analytical chamber of the LV-SEM.