Study of surface mechanisms in organic film mediated area selective atomic layer deposition KU Leuven
Modern chips are likely the most complex man-made devices ever produced. Their manufacturing heavily relies on top-down patterning techniques, which struggle to meet the ever-increasing requirements for alignment and minimum feature size imposed by the never-ending device miniaturization. Area-selective deposition (ASD), a bottom-up substrate-selective material deposition technique, has the potential to alleviate such manufacturing ...