B-spline X-ray diffraction imaging - Rapid non-destructive measurement of die warpage in ball grid array packages KU Leuven
Next generation “More than Moore” integrated circuit (IC) technology will rely increasingly on the benefits attributable to advanced packaging (www.itrs.net [1]). In these increasingly heterogeneous systems, the individual semiconductor die is becoming much thinner (25 to 50 μm, typically) and multiple dies can be stacked upon each other. It is difficult to assess non-destructively, non-invasively and in situ the stress or warpage of the ...