Ab initio modeling of Extreme UV - Matter interactions KU Leuven
For many decades, progress in the electronics industry has been, and is still, driven by the miniaturization of integrated circuits (ICs). Besides getting smaller the circuit designs are also getting more and more complex. Creating the patterns to realize these circuits on a chip is performed by using photolithography. In photolithography a chemical photoresist is irradiated by laser light in the desired pattern. After washing away the ...