Ultra-High Performance MEMS Coupled Resonant Sensors Utilizing Its Bifurcation Points For Stiffness Detection Based On Parametric Pumping. KU Leuven
In recent years, interests in MEMS resonators have grown rapidly, thanks to the rapid development of microfabrication techniques, including vacuum packaging processes. MEMS resonators are employed as the key building block in a wide range of applications such as sensors[1]-[4], time references[5,6], and filters[7]-[10]. Among those applications, MEMS resonator-based sensors, such as resonant accelerometers [11]-[13] provide an exciting ...